Design and Simulation of MEMS Sensor for Detection of Arterial Pulse
DOI:
https://doi.org/10.24297/ijct.v17i2.7574Keywords:
Traditional Indian Medicine (TIM), MEMS, FEM (Finite element analysis), COMSOLE MultiphysicsAbstract
The work presented in this paper describe the design and simulation of a MEMS (Micro Electro Mechanical System) system based piezoelectric sensor for detecting arterial pulse in biomedical application. The study is done through the analysis of square and circular diaphragm made out of piezoelectric and MEMS material. In this work, piezoelectric material is used which work on the principle of piezoelectric effect. In piezoelectric effect, diaphragm reorients under stress, form an internal polarization which result in crystal charge on the crystal face that is proportional to applied pressure. When pressure is applied on diaphragm deformation occurs which converts physical energy into output electrical voltage. For selecting the appropriate geometry and material for sensor design different parameter were checked such as deformation, output voltage, Stress and linearity. FEM analysis is done for circular and square diaphragm on COMSOL Multi-Physics. Comparison of square and circular diaphragm is done on the basis of deformation and Electrical potential. Piezoelectric sensor is designed and simulated with lithium-Niobate and poly-si. Sensitivity obtained for the designed sensor is about 4mV/Kpa.
Downloads
References
Jae J. Im' and Charles S, “A Study For The Development Of A Noninvasive Cointinuous Blood Pressure Measuring System By Analyzing Radial Artery Pulse From A Wrist” 1995 IEEE-EMBC and CMBEC
Yu-Pin Hsu and Darrin J. Young, “Skin-Coupled Personal Wearable Ambulatory Pulse Wave Velocity Monitoring System Using Microelectromechanical Sensors” Member IEEE SENSOR JOURNAL.
Y. Ono, Q. Liu, M. Kobayashi, C.-K. Jen, and A. Blouin,“A Piezoelectric Membrane Sensor for Biomedical Monitoring” 2006 IEEE Ultrasonics
Avishek Ghosh, Sunipa Roy,C.K.Sarkar, “Design and Simulation of MEMS Based Piezoresistive pressure sensorfor Enhanced sensitivity”, IEEE2013
Rongjie Liang , Qing- Ming Wang, “Pulse Pressure Sensor Based O Flexible PZT Thick-Film Composite Device” 2014 IEEE International Ultrasonics Symposium Proceedings
“Piezoresistive MEMS Pressure Sensors using Si, Ge, and SiC Diaphragms:A VLSI Layout Optimization”, International Conference on Communication and Signal Processing .IEEE 2014
U.Samapth Kumar, N.Jagadesh Babu, “Design and simulation of MEMS Piezoresistive Pressure Sensor to Improve the sensitivity”, International journal of innovative reaserch in electrical, electronics, Instrumentation and control Engineering,3 march 2015.
S Santosh Kumar, Anuj Kumar Ojha, Ramprasad Nambisan, Anil Kumar Sharma, B D Pant, “Design and Simulation of MEMS Silicon Piezoresistive Pressure Sensor for Barometric Applications”.
Rongjie Liang , Qing- Ming Wang, “Pulse Pressure Sensor Based O Flexible PZT Thick-Film Composite Device” 2014 IEEE International Ultrasonics Symposium Proceedings
“Piezoresistive MEMS Pressure Sensors using Si, Ge, and SiC Diaphragms: A VLSI Layout Optimization”, International Conference on Communication and Signal Processing .IEEE 2014
U.Samapth Kumar, N.Jagadesh Babu, “Design and simulation of MEMS Piezoresistive Pressure Sensor to Improve the sensitivity”, International journal of innovative research in electrical, electronics, Instrumentation and control Engineering,3 march 2015.
S Santosh Kumar, Anuj Kumar Ojha, Ramprasad Nambisan, Anil Kumar Sharma, B D Pant, “Design and Simulation of MEMS Silicon Piezoresistive Pressure Sensor for Barometric Applications”.
Wang Lijing, Shi Liping and Zhao Yuerong, “Simulation of Piezoelectric Sensor-Actuators Based on Multi-Piezoelectric Effect”, 2010 2nd International Asia Conference on Informatics in Control, Automation and Robotics.
Likun Wang and Lei Qin Li Li “Piezoelectric Dynamic Pressure Sensor” , Proceedings of the 2010 IEEE International Conference on Information and Automation June 20 - 23, Harbin, China.
Steve Carter, Alex Ned, John Chivers, Andy Bemis,Selecting “Piezoresistive vs. Piezoelectric Pressure Transducers”.
Likun Wang and Lei Qin Li Li “Piezoelectric Dynamic Pressure Sensor” , Proceedings of the 2010 IEEE International Conference on Information and Automation June 20 - 23, Harbin, China.
Herztman, "Photoelectric Plethysmography of the fingers and toes in man", [Proceedings of the Society for Experimental Biology and Medicine 37:1622-1637 (1937).
Dupuis & Eugene, in "IEEE Transaction on Instrumentation & Measurement", 49:498-502 (2000)
Sorvoja H. et.al. Licentiate Thesis, University of Oulu (1998--in Finnish).
Ruha et al., in Proceedings of Biosignal 1:198-200 (1996)
Gagnadre et al., in Electronic Letters, 32:19911993 (1998)
Piezoelectric sensor for Pulse Detection, Defence Science Journal (DRDO 2007)
Arterial pulse system: modern methods for traditional Indian medicine by Joshi A, Chandran S, Jayaraman V K, Kulkarni B D, Conference Proceeding IEEE Eng Med Biol Soc. 2007.
Non-invassive Device Nadi Tarangini Useful For Quantitave Detection Of Arterial Nadi Pulse Waveform by Ashok Bhat, Aniruddha Joshi (2010, Patent)
Shwetha Meti, Kirankumar B. Balavald, B. G. Sheeparmatti, “MEMS Piezoresistive Pressure Sensor: A Survey”, Int. Journal of Engineering Research and Applications, ISSN: 2248-9622, Vol. 6, Issue 4, (Part - 1) April 2016, pp.23-31.
Downloads
Published
How to Cite
Issue
Section
